Semicorex: Premium Alumina Ceramic Products for High-Performance Needs


Alumina (Al2O3) is renowned as a high-performance ceramic material, integral to numerous industries due to its exceptional wear resistance and versatility. With a molecular weight of 102, it forms a critical component in the field of technical ceramics. Post-firing and sintering, alumina parts require advanced diamond-grinding techniques for precise machining, ensuring superior performance in demanding applications.

Key Attributes of Semicorex Alumina Ceramics


Semicorex offers a broad range of alumina ceramics characterized by:


High Melting Point: Capable of withstanding temperatures up to 2,072°C, alumina is ideal for high-temperature environments.


Outstanding Hardness and Wear Resistance: Alumina’s inherent hardness ensures longevity and resistance to mechanical wear.


Minimal Erosion: Exhibits low erosion rates, extending the operational lifespan of components.


Wide Range of Purity: Available in purities from 90% to 99.9%, with higher purity levels enhancing hardness and application effectiveness.

Critical Applications in the Semiconductor Industry


Wafer Processing: Including polishing, epitaxy, oxidation, and diffusion.


Photolithography and Etching: Essential for precision in patterning and material removal processes.


Ion Implantation: Provides reliable performance in advanced ion implantation processes.




Electrostatic Chuck


Utilizing electrostatic adsorption, this innovative component replaces traditional clamping methods, leveraging built-in electrodes to secure substrates. With high mechanical strength and superior resistance to plasma erosion, it ensures reliable and efficient semiconductor processing.


End Effector


Designed for silicon wafer handling, alumina ceramic robot arms from Semicorex offer an economical and robust solution. Their excellent mechanical strength, combined with cost-effectiveness, makes them ideal for high-precision semiconductor applications.