Semicorex: Premium Alumina Ceramic Products for High-Performance Needs


Alumina (Al2O3) is renowned as a high-performance ceramic material, integral to numerous industries due to its exceptional wear resistance and versatility. With a molecular weight of 102, it forms a critical component in the field of technical ceramics. Post-firing and sintering, alumina parts require advanced diamond-grinding techniques for precise machining, ensuring superior performance in demanding applications.

Key Attributes of Semicorex Alumina Ceramics


Semicorex offers a broad range of alumina ceramics characterized by:


High Melting Point: Capable of withstanding temperatures up to 2,072°C, alumina is ideal for high-temperature environments.


Outstanding Hardness and Wear Resistance: Alumina’s inherent hardness ensures longevity and resistance to mechanical wear.


Minimal Erosion: Exhibits low erosion rates, extending the operational lifespan of components.


Wide Range of Purity: Available in purities from 90% to 99.9%, with higher purity levels enhancing hardness and application effectiveness.

Critical Applications in the Semiconductor Industry


Wafer Processing: Including polishing, epitaxy, oxidation, and diffusion.


Photolithography and Etching: Essential for precision in patterning and material removal processes.


Ion Implantation: Provides reliable performance in advanced ion implantation processes.




● Electrostatic Chuck


Utilizing electrostatic adsorption, this innovative component replaces traditional clamping methods, leveraging built-in electrodes to secure substrates. With high mechanical strength and superior resistance to plasma erosion, it ensures reliable and efficient semiconductor processing.


● End Effector


Designed for silicon wafer handling, alumina ceramic robot arms from Semicorex offer an economical and robust solution. Their excellent mechanical strength, combined with cost-effectiveness, makes them ideal for high-precision semiconductor applications.