Quartz Tanks for Wet Process by Semicorex

Semicorex supplies high-quality quartz tanks (also known as quartz baths) that are indispensable for various wet processes in wafer fabrication. Our quartz tanks are manufactured from semiconductor-grade quartz, known for its exceptional durability and chemical inertness. These characteristics render our quartz tanks suitable for handling a variety of aggressive chemistries—including H2SO4, H2O2, and SC1—while ensuring that they remain unreactive and maintain their structural integrity.

Comprehensive Wafer Cleaning Solutions

In the intricate steps of wafer fabrication, wafers may be masked to etch specific areas or to limit diffusion to targeted regions. Once a process step is completed, it’s crucial to remove the masking material without introducing any contamination. Our quartz tanks play a vital role in this phase, providing an environment that minimizes particle contamination. Available in heated and re-circulating models, these tanks ensure that wafers are thoroughly cleaned while preventing the introduction of contaminants. This feature is essential for maintaining the high standards required in semiconductor manufacturing.