Quartz Tubes by Semicorex: For Thermal Oxidation and Annealing
Quartz tubes play a crucial role in the oxidation and diffusion stages of semiconductor wafer production. They are used to create an ideal environment for these processes, helping to prevent contamination from furnace atmospheres. For instance, potential contaminants such as sodium, which is naturally present in the silica sand used to manufacture fused quartz, are effectively controlled. This ensures that the wafers remain pure and free from impurities that could affect their quality and performance.
Key Features and Benefits
High-Temperature Resistance: Capable of withstanding temperatures up to 1250°C, essential for thermal oxidation and annealing processes.
Thermal Shock Resistance: High resistance to rapid temperature changes, ensuring durability and reliability.
UV Transparency: Excellent ultraviolet light transmission, enhancing the effectiveness of UV-sensitive processes.
Exceptional Purity: 99.998% silica content ensures the highest level of purity, preventing contamination and defects.
