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CVD SiC Coated Wafer Boats

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CVD SiC Coated Wafer Boats
Semicorex CVD SiC-coated wafer boats are the essential wafer-carrying tools extensively applied in the high-end semiconductor manufacturing industry. With multiple excellent performance advantages, Semicorex CVD SiC-coated wafer boats are the optimal SiC ceramic solutions for the high-temperature treatments such as oxidation, diffusion, and annealing processes.

With the advancement of semiconductor manufacturing processes, high-temperature process components such as wafer boats face increasingly stringent performance requirements, including higher purity and impurity control, better durability and longer service life, as well as more flexible customization capabilities to match various process needs. Semicorex CVD SiC-coated wafer boats can perfectly address all these needs benefiting from their premium materials, precise processing, and thoughtful design.

Advantages of Semicorex CVD SiC-coated wafer boats

1.Ultra-high cleanliness performance

Direct contact between wafer boats and wafers is inevitable in the course of wafer production. For this reason, wafer boats must fully meet the stringent industrial cleanliness standard, which is crucial to ensure stable performance and the qualified yield of final chips. Semicorex CVD SiC-coated wafer boats are manufactured from high-grade silicon carbide materials, delivering exceptional cleanliness. Their base impurities are controlled below 100 ppm and coating impurities are controlled to less than 1 ppm, which perfectly meets the ultra-high cleanliness requirement of semiconductor manufacturing.

2.Advanced 3D printing technology

Semicorex CVD SiC-coated wafer boats are formed through advanced 3D printing molding technology. By adopting this integrated molding approach, Semicorex CVD SiC-coated wafer boats can effectively avoid the structural weak points caused by assembly methods, which ensures reliable load-bearing capacity of wafer boats. 3D printing molding technology can allow seamless shaping of complex geometric structures with precise dimensional control, making Semicorex CVD SiC-coated wafer boats perfectly match various customized requirements and equipment specifications.

3.Dependable CVD SiC coating treatment

Semicorex CVD SiC-coated wafer boats adopt CVD-grown SiC coating on their base surface, which significantly improves their thermal resistance and thermal conductivity, enabling them stably operate at high-temperature conditions with temperatures around 1250 ℃. The coating of Semicorex CVD SiC-coated wafer boats features strong bonding strength with their base without easy peeling off. This SiC coating can effectively protect the base of wafer boats from corrosive gases and chemical reagents, which significantly prolongs the service life of Semicorex CVD SiC-coated wafer boats.