Heating Elements

Semicorex heating elements, constructed from high-purity graphite and protected with a robust silicon carbide (SiC) coating, are engineered to meet the demanding requirements of Metal-Organic Chemical Vapor Deposition (MOCVD) systems. These components are critical in enabling consistent, high-efficiency thermal processing in the semiconductor and optoelectronics industries, particularly in the production of LEDs, power devices, and compound semiconductors such as GaN and GaAs.

Heating elements are isostatically pressed, fine-grain graphite, known for its excellent thermal conductivity, low thermal expansion, and uniform heat distribution. To enhance chemical resistance and extend operational lifespan, the graphite substrate is coated with a dense, uniform layer of silicon carbide (SiC). This SiC layer is chemically inert and highly resistant to corrosion from aggressive gases commonly used in MOCVD environments, such as ammonia, hydrogen, and metal-organic precursors.

SiC coated graphite has the characteristics of high temperature resistance, oxidation resistance, high purity, acid, alkali, salt and organic reagent resistance, and stable physical and chemical properties. Compared with high-purity graphite, high-purity graphite begins to oxidize strongly at 400°C. Even if the temperature is not high, long-term use will cause powder to fall due to oxidation, which will adhere to the workpiece and table or pollute the use environment. Therefore, SiC coated graphite, as a new consumable, has gradually replaced high-purity graphite bases in MOVCD equipment, powder sintering and other processes.

The coating of products such as SiC coated graphite is to release silicon from special gases under high temperature conditions. Silicon and carbon are directly combined to wrap the graphite matrix of a specific shape to form a SiC protective layer. The formed SiC is firmly coated on the graphite matrix, giving the graphite matrix special properties, so that the graphite surface is dense, non-porous, high temperature resistant, corrosion-resistant, and oxidation-resistant.

We offer flexible customization options to meet specific design and performance requirements, including tailored geometries, surface finishes, and mounting interfaces. Our engineering team collaborates closely with equipment manufacturers and end-users to ensure seamless integration and optimal performance within various MOCVD platforms.

Invest in our Graphite Heating Elements with SiC coating and experience a significant upgrade in the reliability, precision, and efficiency of your MOCVD processes. Achieve superior film quality, minimize operational disruptions, and unlock the full potential of your semiconductor device fabrication. Contact us today to discuss your specific needs and discover how our advanced heating solutions can elevate your MOCVD operations to new heights.