Insulation Felt with Glassy Carbon Coating

Semicorex Insulation Felt with Glassy Carbon Coating is an advanced thermal insulation component specifically engineered for use inside epitaxial reactors, where high-temperature stability, purity, and performance are critical. This specialized felt is designed to function as a thermal barrier within the hot zone of the reactor, providing optimal thermal insulation, dimensional stability, and chemical resistance under extreme process conditions.

This Insulation Felt with Glassy Carbon Coating consists of a high-purity carbon or graphite fiber felt substrate, which is uniformly coated with a layer of glassy carbon. The base felt offers low thermal conductivity and excellent thermal shock resistance, while the glassy carbon coating enhances the surface strength, reduces particle shedding, and improves chemical inertness. Together, they form a composite insulation material ideal for demanding semiconductor and photovoltaic manufacturing environments.

The Glassy Carbon Coating is a smooth, hard coating, enhances the felt’s surface integrity, preventing fiber release and minimizing contamination risks, which is especially important in ultra-clean semiconductor production.

This coating is a new technology that can mainly enhance the scratch resistance life and reduce dust. The coating has been applied to the crystal growth resistance furnace and has excellent life performance. It effectively improves the oxidation resistance of hard felt; the glassy carbon coating has good thermal insulation performance.

Insulation felt with glassy carbon coating is a material whose substrate is rigid felt and is made by impregnating or coating glassy carbon. The glassy carbon coating can eliminate the generation of furnace particles, provide sealed surface pores, have excellent demolding properties and reduce permeability, making the material very suitable for continuous casting molds and products in the semiconductor industry. This material has a wide range of applications in the semiconductor industry, especially in graphite parts such as single crystal silicon pulling equipment components, epitaxial growth components, continuous casting molds, glass sealing jigs, etc.

Insulation felt with glassy carbon coating is mainly used in industries that require high durability, corrosion resistance and conductivity. These industries include semiconductors, metallurgy and other industries, and traditional graphite materials may not be able to meet these requirements due to easy wear and corrosion.

The semiconductor industry is the main driver of the insulation felt with glassy carbon coating. Due to its dust-proof and surface hardness-enhancing properties, the material is used in components such as single-crystal silicon pulling equipment parts, epitaxial growth parts, continuous casting molds and glass sealing devices.