Quartz Ring
In semiconductor manufacturing, precision and reliability are paramount. The Quartz Ring from Semicorex is engineered to be installed between the wafer and the electrode in etching process. It serves several critical functions:
Guiding Reaction Gas: The Quartz Ring efficiently channels the reaction gas to the wafer surface that needs to be etching processed, ensuring uniform gas distribution and optimal etching process.
Separating Products and Waste: The Quartz Focus Ring effectively segregates the finished product from waste material in etching process, thereby maintaining the integrity and quality of the etched wafers.
Ensuring Quality and Efficiency: By performing these roles, the Quartz Ring significantly enhances both the quality and efficiency of the etching process, which is vital for producing high-performance semicnductor devices.
Extreme Hardness and Purity of the Focus Ring
Our Quartz Rings are produced by melting crystalline sand using advanced melting technology. This process allows us to achieve chemical purity levels of the focus ring ranging from 99.995% to 99.999%. Such high purity levels are crucial in minimizing the risk of metal contamination during fabrication, which is especially important in sensitive applications like etching processing.
Remarkable Thermal Stability of the Focus Ring
Thermal stability is another critical advantage of our Quartz Ring. The quartz focus ring has a very low thermal expansion coefficient, allowing it to endure severe temperature fluctuations without cracking or breaking. For example, even when heated to 1100°C and then suddenly immersed in cold water, the focus ring does not burst. This remarkable property makes our Quartz Ring ideal for etching processing involving extreme thermal cycling, ensuring consistent performance and long-term reliability.
Remarkable Stability of the Focus Ring Under Atomic Bombardment
The remarkable stability of our Quartz Rings under atomic bombardment is a testament to their robustness. In semiconductor etching process, materials are often exposed to high-energy particles that can compromise structural integrity. Our Focus Rings, however, are engineered to withstand such environments, maintaining the focus ring's performance and reliability. This stability ensures that the focus rings can endure the rigors of the etching process without degrading, thereby extending the lifespan of your equipment and reducing maintenance costs.
In-House Manufacturing Capabilities
At Semicorex, we have vertically integrated in-house capabilities that allow us to maintain full control over the production process. Our facilities include advanced equipment for core drilling, grinding, and machining solid quartz from ingots. This integrated approach ensures that we can produce Quartz Rings that meet the exact specifications required by our clients.
Rigorous Quality Assurance
Quality assurance is a cornerstone of our manufacturing process. Our inspection facility is equipped with the finest measuring equipment available, allowing us to manufacture parts according to the precise tolerance specifications required by our clients. Every Quartz Ring undergoes thorough inspection and testing to ensure it meets our stringent quality standards.
