Aluminum Nitride Ceramic Crucibles
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Aluminum Nitride Ceramic Crucibles
Semicorex porous alumina ceramic chucks are high-end porous alumina ceramic clamping solutions engineered specifically for semiconductor wafer processes, including wafer thinning, grinding, cleaning and inspection. Benefiting from Semicorex' advanced material technology, precision machining capability, and strict quality control, these porous alumina ceramic chucks can enable contact-free, stress-free and contamination-free wafer clamping during high-precision semiconductor manufacturing.
Semicorex porousaluminaceramicchucks are the high-performance process fixtures adopting vacuum adsorption to clamp and fix ultra-thin wafers and workpieces. Their adsorption surfaces are made of porous ceramic plates with dense micron pore channels. Through these micron-scale pore channels, Semicorex porousaluminaceramicchucks can generate a uniform negative pressure to firmly clamp ultra-thin wafers and workpieces during processing. Unlike conventional mechanical fixtures that easily cause deformation, warping and breakage of wafers and workpieces, Semicorex porousaluminaceramicchucks can provide an ideal stable platform for wafer processing, thus effectively ensuring the precision and production yield in core semiconductor fabrication steps.
Advantages of Semicorex porous alumina ceramic chucks
1. Excellent adsorption performance
A.Micron-level surface parallelism, offering an optimal pressing platform for ultra-thin wafers and workpieces.
B.Evenly distributed microporous structure enables consistent negative pressure across the entire adsorption surface of porous alumina ceramic chucks.
2.Reliable cleanliness
A.High purity alumina materials, free from impurity contamination.
B.Solid and stable material construction minimizes particle shedding.
C.Vacuum adsorption instead of conventional mechanical clamping achieves contact-free wafer holding.
3. Exceptional material properties
A.Superior thermal resistance to fit high-temperature operating conditions.
B.Strong chemical corrosion resistance to withstand high-corrosive working environments
C.High hardness and wear resistance to ensure the durability of porous alumina ceramic chucks.
Applications of Semicorex porous alumina ceramic chucks
1. Semiconductor wafer manufacturing
2. Flat panel display industry
3. Photovoltaic manufacturing sector
4. Precision machining field
Why choose Semicorex?
Relying on its integrated precision production lines and a professional technical team, Semicorex is capable of stable and high-precision machining, offering custom solutions matching our customers' requirements and application scenarios.
1. Providing small-batch trial production and consistent mass production.
2. Providing different materials for selection
A. Porous ceramic materials: alumina, silicon carbide
B. Color of porous ceramic plates
C. Porous ceramic pore size and porosity
D. Base materials: metal, alumina, silicon carbide
3. Tailoring our porousaluminaceramic chucks in shapes, dimensions, thickness, flatness, tolerances and other requirements.
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