SiC Boat Holder

Semicorex SiC Boat Holder is made of silicon carbide as the main material. Compared with traditional quartz boat supports, SiC Boat Holder have better thermal stability and can maintain stability in high temperature environments. SiC Boat Holder perform well in high temperature environments and are not easily deformed or damaged by heat. They are suitable for production processes that require high temperature treatment and are conducive to maintaining the stability and consistency of the production process.

 

Silicon carbide has excellent corrosion resistance, can resist the erosion of chemical substances, prolong service life, and will not release harmful chemicals, which meets environmental protection requirements. At the same time, SiC Boat Holder also have better cost advantages. Although the price of silicon carbide materials themselves is relatively high, their durability and stability can reduce operating costs and replacement frequency. In the long run, they have higher economic benefits and have become the mainstream products in the photovoltaic boat support market.

LPCVD equipment is used for the preparation process of cell tunneling oxidation and doped polysilicon layer. The working principle is to achieve chemical reaction and deposition film formation in a low-pressure atmosphere combined with appropriate temperature, thereby preparing ultra-thin tunneling oxide layer and polysilicon film. In the preparation process of tunneling oxidation and doped polysilicon layer, the boat support has a high working temperature and a silicon film will be deposited on the surface. The thermal expansion coefficient of quartz is quite different from that of silicon. When used in the above process, it is necessary to regularly pickle to remove the silicon deposited on the surface to prevent the quartz boat holder from breaking due to the different thermal expansion coefficient from silicon. Due to frequent pickling and low high-temperature strength, the quartz boat holder has a short life and is frequently replaced in the tunneling oxidation and doped polysilicon layer preparation process, which significantly increases the production cost of the battery cell. The expansion coefficient of silicon carbide is close to that of silicon. In the tunneling oxidation and doped polysilicon layer preparation process, the silicon carbide integrated boat holder does not need pickling, has high high-temperature strength and long service life. It is a good alternative to the quartz boat holder.

 

The boron expansion equipment is mainly used for the process of doping the N-type silicon wafer substrate of the battery cell with boron to prepare the P-type emitter to form a PN junction. The working principle is to realize chemical reaction and molecular deposition film formation in a high-temperature atmosphere. After the film is formed, it can be diffused by high-temperature heating to realize the doping function of the silicon wafer surface. Due to the high working temperature of the boron expansion equipment and the low high-temperature strength of the quartz boat holder, the service life in the boron expansion equipment is short. The integrated SiC Boat Holder has high high temperature strength and is a good substitute for the quartz boat support in the boron expansion process.