SiC Boats
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SiC Boats
Semicorex SiC Boats are silicon carbide ceramic wafer carriers widely used in high-temperature processes of semiconductor manufacturing.
SemicorexSiC Boats are a commonly used tool, in the manufacturing process of semiconductor integrated circuits (ICs), mainly used to carry, transport, clean and process chips. Its function is similar to that of a transport tool, ensuring that chips can be processed smoothly and safely in each link in the complex manufacturing process.
SiC Boats are tools used to carry and transport chips in the semiconductor manufacturing process. Its name"Wafer Boat"figuratively describes its role in semiconductor manufacturing, just like a small boat (single wooden boat), which is responsible for carrying chips between different process steps. In the manufacturing process of semiconductor chips, a series of physical and chemical processes are usually required, such as high-temperature heating, cleaning, etching, drying, chemical treatment, etc. SiC boats play an important role in transporting chips from one process link to another.
Specifically, the main functions of SiC Boats include:
Chip carrying and transporting: safely and accurately transporting chips from one process step to the next.
- Chip support: When performing high-temperature or chemical treatment, SiC Boats provide support for chips to prevent them from being damaged due to deformation or stress concentration.
- Protection and isolation: In some sensitive processes, SiC Boats can also effectively isolate the chip from the external environment, reducing the risk of contamination and damage.
- Chemical reaction medium: In some chemical treatment processes, the material of SiC Boats also needs to be corrosion-resistant, acid-resistant and alkali-resistant to ensure that the chip is not affected during the treatment process.
SiC Boats is a kind of equipment used in high-temperature treatment processes, mainly made of silicon carbide material, with the following characteristics and applications:
High-temperature resistance: SiC Boats can work stably in high-temperature environments up to 1600°C, and is suitable for various heat treatment processes such as diffusion, oxidation, CVD (chemical vapor deposition) and annealing.
Chemical stability: This material has good chemical corrosion resistance and can resist the erosion of various chemicals, thus extending the service life.
Cost-effectiveness: Although the initial investment of silicon carbide wafer boats is high, it can save operating costs and replacement frequency in the long run due to its durability and stability.
Manufacturing process:
SiC Boats: This boat prevents particle generation by coating a layer of SiC film of about 100μm on the surface, but the coating is easy to fall off due to the mismatch of thermal expansion coefficient.
Recrystallized SiC Boats with CVD-SiC coating: This boat is made by sintering and processing unit parts first, then bonding them into boats with Si paste, and finally CVD coating. Although the manufacturing process is long and costly, there is no CTE mismatch problem.
One-piece SiC boat without CVD coating: This boat is made of dense SiC material, such as pressureless sintered SiC or reaction sintered SiC, but it is difficult to process due to the high processing cost.
Kalex SiC combined boat: It uses pressureless sintered SiC material and is combined into an integrated boat by screws and pins. It does not require CVD coating and is suitable for use in harsh environments.
In summary, SiC Boats have been widely used in photovoltaic cell preparation and other high-temperature processing fields due to their excellent high-temperature resistance and chemical stability.
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