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PBN Heater

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PBN Heater
Semicorex PBN Heater is renowned for exceptional purity, stability, and performance in high-temperature, high-vacuum, and high-purity applications.
Semicorex Pyrolytic Boron Nitride heaters(PBN heaters) harness the unique properties of these advanced ceramics to deliver unparalleled thermal performance and durability, making them indispensable in the semiconductor industry and other demanding environments.
                                                                                                                                          
Structure

The PBN heaters feature a sophisticated three-layer design that combines the unique properties of PBN(Pyrolytic Boron Nitride) and PG(Pyrolytic Graphite). This design creates a micro-ceramic heating system known for its exceptional performance and durability. The PG/PBN heater system's core is a PG layer, which functions as both a conductor and a heater. The PG layer is meticulously deposited on the surface of PBN heaters using the Chemical Vapor Deposition (CVD) method, ensuring a uniform and highly conductive surface. Depending on the application's specific requirements, the PG heating element can either be left exposed or covered with an additional layer of PBN heater, providing flexibility in design and functionality.
The PBN layers on either side of the PG core serve as electrical insulators while also enhancing the mechanical strength and dimensional stability of the Pyrolytic Boron Nitride heaters. The result is a compact and robust ceramic PBN heater capable of withstanding the rigors of high-temperature operations without compromising on performance or longevity.
PBN heaters Pyrolytic Boron Nitride PG Structure
               - Structure of PBN heater
Applications
Semiconductor Substrate Heating: These PBN heaters are extensively used in semiconductor processes such as MBE, MOCVD, Sputtering, and CVD. Pyrolytic Boron Nitride heaters' high purity and stability ensure that the substrates are heated uniformly without contamination, thereby enhancing the quality and yield of semiconductor devices.

Superconductor Substrate Heating: The unique thermal properties of PBN heaters make them suitable for the precise and uniform heating required in superconductor fabrication.

Sample Heating During Analysis: Whether in a vacuum or inert atmosphere, these Pyrolytic Boron Nitride heaters provide rapid and controlled heating for sample analysis, ensuring accurate and reproducible results.

Sample Heating for Electron Microscopy: Pyrolytic Boron Nitride heaters offer the clean, controlled heating environment required for detailed sample analysis without the risk of contamination or thermal degradation.
PBN Heaters types
                                                                     - Different types of PBN heaters

Advantages

Micro-ceramic PG heating element has an operating temperature to 1700°C.
High mechanical durability and dimensional stability.
Dimensionally compact. PBN layer provides electrical insulation.
Thermal gradients can be tailored to meet specific requirements.
Eliminate outgassing and contaminations.
High thermal shock resistance.
Chemically inert to almost all metals, liquids and gas.
Large variety of PG heater and Pyrolytic Boron Nitride heater shapes available.

SemicorexPyrolytic Boron Nitride/PG Composite Heating Elements represent the pinnacle of ceramic heating technology, combining the best attributes of Pyrolytic Boron Nitride and Pyrolytic Graphite to deliver unmatched performance in high-temperature, high-vacuum, and high-purity environments. Their exceptional thermal conductivity, purity, and stability make PBN heater the ideal solution for semiconductor processing, superconductor substrate heating, and various analytical applications. With a design that can be tailored to meet specific thermal requirements, Pyrolytic Boron Nitride/PG Composite Heating Elements offer a reliable and efficient solution for even the most demanding industrial processes.