Porous Graphite Tubes

 

 

Semicorex Porous graphite tubes are a critical part in the semiconductor industry, particularly in the silicon carbide (SiC) single crystal growth process. These porous graphite tubes are essential for ensuring thermal insulation and uniform heat distribution, both of which significantly impact crystal quality and yield. Our porous graphite tubes are designed to meet the demanding requirements of SiC single crystal growth, offering superior thermal performance, high purity, and excellent mechanical strength.

 

Our porous graphite tubes have high porosity with interconnected pores. This structure facilitates uniform radial heat conduction, reducing thermal gradients within the growth environment and improving crystal yield. Additionally, the tubes exhibit excellent thermal insulation properties, which help maintain a stable temperature profile and contribute to higher-quality crystal formation. The high purity of our graphite material is another crucial factor in semiconductor applications. After purification, the ash content is reduced to below 5 ppm, minimizing contamination risks and ensuring a clean processing environment for high-performance SiC crystal growth.

Mechanical strength is another highlight of our porous graphite tubes. The material is robust enough to undergo ultra-thin machining, allowing for precise customization to meet specific design requirements. This strength also ensures durability and stability during extended operation in high-temperature environments. To maintain consistent quality, our graphite production process is carefully controlled. Unlike large-scale production, we use small-scale carbonization furnaces with a capacity of only 115 cubic meters. Each piece of graphite material is individually monitored and traceable, ensuring high batch consistency and uniform material properties.

Furthermore, temperature control is a critical aspect of our manufacturing process. We implement multi-point temperature monitoring inside the furnace to keep temperature variations within an extremely narrow range. Additionally, multi-point temperature monitoring on the graphite material itself ensures uniform thermal conditions, further enhancing product consistency and performance. These stringent quality control measures guarantee that our porous graphite tubes meet the highest standards required for SiC single crystal growth, ultimately improving crystal yield and overall process efficiency. The batch consistency and material homogeneity of our graphite can be controlled and guaranteed through the production process. Our production adheres to small batch production, and the carbonization furnace only uses a small furnace with a capacity of only 115 cubic meters, which can control the quality of each piece of graphite to the greatest extent. At the same time, each piece of our material is monitored and tracked. When problems occur, the same batch of products can be recalled at the same time to ensure product quality. We monitor the temperature at multiple points in the furnace space to ensure that the temperature difference in each space in the furnace remains in a very small range. At the same time, multi-point temperature monitoring is also carried out on the surface of the material to ensure that the temperature difference remains in a very small range. The quality uniformity of each piece of material is guaranteed by temperature control.