SiC ALD Planetary Susceptor

Semicorex SiC ALD Planetary Susceptor, also known as the SiC coated graphite wafer holder, serves as the foundation upon which substrates are placed during ALD deposition. It performs several critical functions in ALD coating:

• Secure Substrate Support: The SiC ALD Planetary Susceptor made by SiC coated graphite serves as a stable and level wafer holder for the substrate in ALD deposition, preventing movement or dislodging during the delicate deposition process.

• Uniform Temperature Distribution: Maintaining a homogeneous temperature across the substrate surface is paramount for consistent ALD deposition and properties. The SiC ALD Planetary Susceptor made of SiC coated graphite facilitates efficient heat transfer, ensuring the substrate reaches and maintains the desired temperature throughout the film growing cycles in ALD coating.

• Precursor Delivery and Byproduct Removal: The SiC ALD Planetary Susceptor's design and placement during the ALD deposition influence the flow dynamics of precursor gases and reaction byproducts. This ensures efficient delivery of precursors to the substrate surface and effective removal of byproducts, preventing unwanted reactions or film defects in ALD coating.

                                                                                                                                          -  ALD Deposition System

Key material advantages of SiC Coated Graphite in ALD coating:

• Enhanced Film Uniformity: The exceptional thermal properties of SiC coated graphite planetary susceptor ensure consistent temperature distribution across the substrate, resulting in highly uniform film thickness and composition in ALD coating.

• Improved Process Yield: By minimizing particulate contamination and maintaining a pristine process environment during ALD deposition, the SiC coated graphite contribute to higher wafer yields and reduced defect rates in ALD coating.

• Extended Chuck Lifespan: The combination of high-purity materials, chemical inertness, and wear resistance extends the operational life of SiC coated graphite planetary susceptors in ALD coating, reducing the frequency of costly replacements.

• Versatility for Diverse Applications: Semicorex SiC ALD Planetary Susceptor is compatible with a wide range of ALD deposition and substrate materials, making it suitable for various applications, from microelectronics to optoelectronics and beyond.